AlCrTiZrMo amorphous high entropy alloy thin films prepared by magnetic filter cathode vacuum arc deposition

Effects of negative bias on morphology, elements and microstructure of AlCrTiZrMo amorphous high entropy alloy films were investigated by magnetic filter cathode vacuum arc deposition．Film formation and crystallization mechanism of AlCrTiZrMo amorphous high entropy alloy films were investigated．SEM, EDS, XRD and TEM were used to examine and analyze film morphology and structure．These films were found to have excellent surface quality under different ionic energy for deposition．With increasing energy, film thickness decreased．The deposition ion energy was found to have a significant effect on the regulation of crystal phase．An increase in deposition ion energy was found to change microstructure of AlCrTiZrMo high entropy alloy film from amorphous phase (am) to phase stable am +FCC nanocomposite structure．