LIANG Chang lin CHENG Guoan ZHENG Ruiting HAN Dongy an. TEXTURE AND PROPERTIES OF TIALN GRADIENT FILMS FABRICATED BY MAGNETRON FILTERED , PULSED VACUUM ARC, PLASMA REACTIVE DEPOSITION[J]. Journal of Beijing Normal University(Natural Science), 2011, 47(3): 249-253.
Citation: LIANG Chang lin CHENG Guoan ZHENG Ruiting HAN Dongy an. TEXTURE AND PROPERTIES OF TIALN GRADIENT FILMS FABRICATED BY MAGNETRON FILTERED , PULSED VACUUM ARC, PLASMA REACTIVE DEPOSITION[J]. Journal of Beijing Normal University(Natural Science), 2011, 47(3): 249-253.

TEXTURE AND PROPERTIES OF TIALN GRADIENT FILMS FABRICATED BY MAGNETRON FILTERED , PULSED VACUUM ARC, PLASMA REACTIVE DEPOSITION

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