Shen Yan　 Zhou Jing 　 Liu Dahe. MEASURING PRECISION LIMITOF DISPLACEMENT SENSOR BASED ON VARIED-LINE-SPACE PLANE PHASE GRATING[J]. Journal of Beijing Normal University(Natural Science), 2007, 43(2): 166-169.
Citation: Shen Yan　 Zhou Jing 　 Liu Dahe. MEASURING PRECISION LIMITOF DISPLACEMENT SENSOR BASED ON VARIED-LINE-SPACE PLANE PHASE GRATING[J]. Journal of Beijing Normal University(Natural Science), 2007, 43(2): 166-169.
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MEASURING PRECISION LIMITOF DISPLACEMENT SENSOR BASED ON VARIED-LINE-SPACE PLANE PHASE GRATING

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